| Electrostatic-comb drive of lateral polysilicon resonators WC Tang, TCH Nguyen, MW Judy, RT Howe Sensors and Actuators A: Physical 21 (1-3), 328-331, 1990 | 697 | 1990 |
| Microfabricated hinges KSJ Pister, MW Judy, SR Burgett, RS Fearing Sensors and Actuators A: Physical 33 (3), 249-256, 1992 | 552 | 1992 |
| CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers S Shelton, ML Chan, H Park, D Horsley, B Boser, I Izyumin, R Przybyla, ... 2009 IEEE International Ultrasonics Symposium, 402-405, 2009 | 140 | 2009 |
| Bonded wafer optical MEMS process TJ Brosnihhan, MW Judy US Patent 7,083,997, 2006 | 139 | 2006 |
| Accurate assessment of packaging stress effects on MEMS sensors by measurement and sensor–package interaction simulations X Zhang, S Park, MW Judy Journal of microelectromechanical systems 16 (3), 639-649, 2007 | 101 | 2007 |
| Apparatus and method for multi-axis capacitive sensing MW Judy US Patent 5,939,633, 1999 | 101 | 1999 |
| Self-adjusting microstructures (SAMS) MW Judy, YH Cho, RT Howe, AP Pisano [1991] Proceedings. IEEE Micro Electro Mechanical Systems, 51-56, 1991 | 82 | 1991 |
| Evolution of integrated inertial MEMS technology MW Judy Solid-State Sensors Actuator and Microsystems Workshop, 27-32, 2004 | 76 | 2004 |
| Micromechanisms using sidewall beams MW Judy University of California, Berkeley, 1994 | 73 | 1994 |
| Camera with acceleration sensor H Weinberg, C Lemaire, H Samuels, M Judy US Patent App. 11/335,156, 2006 | 56 | 2006 |
| Modular process for integrating thick polysilicon MEMS devices with submicron CMOS JA Yasaitis, M Judy, T Brosnihan, PM Garone, N Pokrovskiy, D Sniderman, ... Micromachining and Microfabrication Process Technology VIII 4979, 145-154, 2003 | 56 | 2003 |
| Dual-axis optical mirror positioning using a nonlinear closed-loop controller T Juneau, K Unterkofler, T Seliverstov, S Zhang, M Judy TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 55 | 2003 |
| Polysilicon hollow beam lateral resonators MW Judy, RT Howe [1993] Proceedings IEEE Micro Electro Mechanical Systems, 265-271, 1993 | 55 | 1993 |
| Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality? IP Prikhodko, JA Gregory, WA Clark, JA Geen, MW Judy, CH Ahn, ... 2016 IEEE/ION Position, Location and Navigation Symposium (PLANS), 1-4, 2016 | 54 | 2016 |
| Overcoming limitations of rate integrating gyroscopes by virtual rotation IP Prikhodko, JA Gregory, DI Bugrov, MW Judy 2016 IEEE International Symposium on Inertial Sensors and Systems, 5-8, 2016 | 49 | 2016 |
| Microphone with variable low frequency cutoff S Bharatan, V Chandrasekaran, X Zhang, MW Judy US Patent 8,447,054, 2013 | 47 | 2013 |
| Apparatus to minimize stiction in micromachined structures RT Howe, HJ Barber, M Judy US Patent 5,542,295, 1996 | 44 | 1996 |
| Reducing offset in accelerometers HR Samuels, DC Hollocher, M Judy, T Juneau US Patent 6,892,576, 2005 | 43 | 2005 |
| Suspension arrangement for semiconductor accelerometer MW Judy US Patent 6,223,598, 2001 | 43 | 2001 |
| Half-a-month stable 0.2 degree-per-hour mode-matched MEMS gyroscope IP Prikhodko, S Nadig, JA Gregory, WA Clark, MW Judy 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017 | 42 | 2017 |
Roger T HoweStanford UniversityDirección de correo verificada de stanford.edu
