Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 19 (1), 015002, 2008
110 2008 A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ...
IEEE Electron Device Letters 30 (7), 718-720, 2009
84 2009 Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol
Sensors and Actuators A: Physical 197, 88-95, 2013
72 2013 MEMS gyroscope with concentrated springs suspensions demonstrating single digit frequency split and temperature robustness J Giner, D Maeda, K Ono, AM Shkel, T Sekiguchi
Journal of Microelectromechanical Systems 28 (1), 25-35, 2018
37 2018 Integration of NEMS resonators in a 65 nm CMOS technology JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ...
Microelectronic Engineering 110, 246-249, 2013
36 2013 The concept of" collapsed electrodes" for glassblown spherical resonators demonstrating 200: 1 aspect ratio gap definition J Giner, AM Shkel
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS …, 2015
34 2015 Monolithic multiband MEMS RF front-end module for 5G mobile H Campanella, Y Qian, CO Romero, JS Wong, J Giner, R Kumar
Journal of Microelectromechanical Systems 30 (1), 72-80, 2020
31 2020 MEMS Gyroscope with Less than 1-deg/h Bias Instability Variation in Temperature Range from− 40 C to 125 C D Maeda, K Ono, J Giner, M Matsumoto, M Kanamaru, T Sekiguchi, ...
IEEE Sensors Journal 18 (3), 1006-1015, 2017
22 2017 Harvester-on-chip: Design of a proof of concept prototype G Murillo, G Abadal, F Torres, JL Lopez, J Giner, A Uranga, N Barniol
Microelectronic engineering 86 (4-6), 1183-1186, 2009
22 2009 Zero-level packaging of MEMS in standard CMOS technology E Marigó, JL Lopez, G Murillo, F Torres, J Giner, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 20 (6), 064009, 2010
19 2010 Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators J Giner, A Uranga, F Torres, E Marigo, N Barniol
Electronics letters 46 (9), 640, 2010
18 2010 A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators J Giner, A Uranga, JL Muñóz-Gamarra, E Marigó, N Barniol
Journal of Micromechanics and Microengineering 22 (5), 055020, 2012
17 2012 VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator JL Lopez, J Verd, A Uranga, G Murillo, J Giner, E Marigó, F Torres, ...
Procedia Chemistry 1 (1), 1131-1134, 2009
16 2009 Design, fabrication, and characterization of a micromachined glass-blown spherical resonator with insitu integrated silicon electrodes and ALD tungsten interior coating J Giner, JM Gray, J Gertsch, VM Bright, AM Shkel
2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015
15 2015 Monolithically integrated double-ended tuning fork-based oscillator with low bias voltage in air conditions JL Lopez, J Verd, E Marigó, A Uranga, G Murillo, J Giner, F Torres, ...
Procedia Chemistry 1 (1), 614-617, 2009
13 2009 High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters JL López, J Verd, J Giner, A Uranga, G Murillo, E Marigo, F Torres, ...
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
12 2009 Dynamicaly balanced degenerate mode gyro with sub-hz frequency symmetry and temperature robustness J Giner, Y Zhang, D Maeda, K Ono, AM Shkel, T Sekiguchi
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
11 2017 Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator J Giner, A Uranga, E Marigò, JL Muñoz-Gamarra, E Colinet, N Barniol, ...
Microelectronic engineering 98, 599-602, 2012
10 2012 Electrically Enhanced Readout System for a High‐Frequency CMOS‐MEMS Resonator A Uranga, J Verd, JL Lopez, J Teva, F Torres, JJ Giner, G Murillo, ...
ETRI journal 31 (4), 478-480, 2009
9 2009 Monolithic MEMS filter banks on RFSOI front-end module H Campanella, Y Qian, CO Romero, J Giner, R Kumar
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
8 2020 
Eloi Marigó FerrerUniversitat Autònoma de BarcelonaDirección de correo verificada de uab.cat
