Ion implantation doping and isolation of GaN SJ Pearton, CB Vartuli, JC Zolper, C Yuan, RA Stall
Applied physics letters 67 (10), 1435-1437, 1995
380 1995 Semiconductor manufacturing using modular substrates M Antonell, EC Houge, N Patel, LE Plew, C Vartuli
US Patent 6,713,409, 2004
205 2004 High temperature electron cyclotron resonance etching of GaN, InN, and AlN RJ Shul, SP Kilcoyne, M Hagerott Crawford, JE Parmeter, CB Vartuli, ...
Applied Physics Letters 66 (14), 1761-1763, 1995
169 1995 Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis FA Stevie, CB Vartuli, LA Giannuzzi, TL Shofner, SR Brown, B Rossie, ...
Surface and interface analysis 31 (5), 345-351, 2001
135 2001 Dry Etch Damage In InN, InGaN and InAIN SJ Pearton, JW Lee, JD MacKenzie, CB Vartuli, SM Donovan, ...
MRS Proceedings 423, 163, 1996
119 1996 Wet chemical etching survey of III-nitrides CB Vartuli, SJ Pearton, CR Abernathy, JD MacKenzie, F Ren, JC Zolper, ...
Solid-State Electronics 41 (12), 1947-1951, 1997
91 1997 ICl/Ar electron cyclotron resonance plasma etching of III–V nitrides CB Vartuli, SJ Pearton, JW Lee, J Hong, JD MacKenzie, CR Abernathy, ...
Applied physics letters 69 (10), 1426-1428, 1996
85 1996 High temperature surface degradation of III–V nitrides CB Vartuli, SJ Pearton, CR Abernathy, JD MacKenzie, ES Lambers, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
83 1996 Cl2 /Ar and CH4 /H2 /Ar dry etching of III–V nitrides CB Vartuli, JD MacKenzie, JW Lee, CR Abernathy, SJ Pearton, RJ Shul
Journal of applied physics 80 (7), 3705-3709, 1996
81 1996 Cl 2/Ar and CH 4/H 2/Ar dry etching of III endash V nitrides CB Vartuli, JD MacKenzie, JW Lee, CR Abernathy, SJ Pearton, RJ Shul
81 * 1996 Wet chemical etching of AlN and InAlN in KOH solutions CB Vartuli, SJ Pearton, JW Lee, CR Abernathy, JD MacKenzie, JC Zolper, ...
Journal of the Electrochemical Society 143 (11), 3681-3684, 1996
76 1996 High rate electron cyclotron resonance etching of GaN, InN, and AlN RJ Shul, AJ Howard, SJ Pearton, CR Abernathy, CB Vartuli, PA Barnes, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1995
61 1995 Effect of dry etching on surface properties of III-nitrides F Ren, JR Lothian, SJ Pearton, CR Abernahty, CB Vartuli, JD MacKenzie, ...
Journal of Electronic Materials 26 (11), 1287-1291, 1997
57 1997 Ion implantation and rapid thermal processing of Ill-V nitrides JC Zolper, M Hagerott Crawford, SJ Pearton, CR Abernathy, CB Vartuli, ...
Journal of Electronic Materials 25 (5), 839-844, 1996
53 1996 Implantation and redistribution of dopants and isolation species in GaN and related compounds RG Wilson, CB Vartuli, CR Abernathy, SJ Pearton, JM Zavada
Solid-state electronics 38 (7), 1329-1333, 1995
53 1995 Temperature dependent electron cyclotron resonance etching of InP, GaP, and GaAs RJ Shul, AJ Howard, CB Vartuli, PA Barnes, W Seng
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (3 …, 1996
47 1996 The incorporation of hydrogen into III-V nitrides during processing SJ Pearton, RJ Shul, RG Wilson, F Ren, JM Zavada, CR Abernathy, ...
Journal of electronic materials 25 (5), 845-850, 1996
46 1996 Nitrogen and fluorine ion implantation in InxGa1− xN JC Zolper, SJ Pearton, CR Abernathy, CB Vartuli
Applied physics letters 66 (22), 3042-3044, 1995
46 1995 Approach to CD-SEM metrology utilizing the full waveform signal JM McIntosh, BC Kane, JB Bindell, CB Vartuli
23rd Annual International Symposium on Microlithography, 51-60, 1998
45 1998 Comparison of inductively coupled plasma and /H etching of III-nitrides H Cho, CB Vartuli, SM Donovan, CR Abernathy, SJ Pearton, RJ Shul, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (3 …, 1998
44 1998