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Nathan Nelson-Fitzpatrick
Nathan Nelson-Fitzpatrick
Process Engineer - Quantum NanoFab
Verified email at uwaterloo.ca
Title
Cited by
Cited by
Year
Metallic NEMS components fabricated from nanocomposite Al–Mo films
Z Lee, C Ophus, LM Fischer, N Nelson-Fitzpatrick, KL Westra, S Evoy, ...
Nanotechnology 17, 3063, 2006
2862006
Data processing pipeline for a time-sampled imaging Fourier transform spectrometer
DA Naylor, TR Fulton, PW Davis, IM Chapman, BG Gom, LD Spencer, ...
Imaging Spectrometry X 5546, 61-72, 2004
292004
Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
E Luber, R Mohammadi, C Ophus, Z Lee, N Nelson-Fitzpatrick, K Westra, ...
Nanotechnology 19, 125705, 2008
242008
Synthesis and characterization of Au–Ta nanocomposites for nanomechanical cantilever devices
N Nelson-Fitzpatrick, C Ophus, E Luber, L Gervais, Z Lee, V Radmilovic, ...
Nanotechnology 18 (35), 355303, 2007
222007
Resonance properties and microstructure of ultracompliant metallic nanoelectromechanical systems resonators synthesized from Al–32; at.;% Mo amorphous-nanocrystalline metallic …
C Ophus, N Nelson Fitzpatrick, Z Lee, E Luber, C Harrower, K Westra, ...
Applied Physics Letters 92 (12), 123108-123108-3, 2008
192008
Electron beam lithography using fixed beam moving stage
I Khodadad, N Nelson-Fitzpatrick, K Burcham, A Hajian, SS Saini
Journal of Vacuum Science & Technology B 35 (5), 2017
142017
Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
N Nelson-Fitzpatrick, C Guthy, S Poshtiban, E Finley, KD Harris, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 31 (2 …, 2013
142013
Highly compliant static microcantilevers fabricated in gold nanocomposite materials
N Nelson-Fitzpatrick, S Evoy
Journal of Micromechanics and Microengineering 21 (11), 115022, 2011
82011
Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
AH Alshehri, N Nelson-Fitzpatrick, KH Ibrahim, K Mistry, M Yavuz, ...
Journal of Vacuum Science & Technology A 36 (3), 2018
72018
Nanocomposite films
D Mitlin, C Ophus, E Stephane, V Radmilovic, R Mohammadi, K Westra, ...
US Patent 7,758,708, 2010
52010
Fabrication and characterization of aluminum-molybdenum nanocomposite membranes
R van den Hurk, N Nelson-Fitzpatrick, S Evoy
Journal of Vacuum Science & Technology B 32 (5), 2014
42014
Bio-inspired nano-photodiode for Low Light, High Resolution and crosstalk-free CMOS image sensing
F Saffih, NN Fitzpatrick, MA Mohammad, S Evoy, B Cui
Circuits and Systems (ISCAS), 2011 IEEE International Symposium on, 797-800, 2011
42011
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
N Nelson-Fitzpatrick, K Westra, P Li, S McColman, N Wilding, S Evoy
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006
42006
Characterization of a non-interdigitated comb drive
M Gopanchuk, M Arabi, N Nelson-Fitzpatrick, MS Al-Ghamdi, ...
International Design Engineering Technical Conferences and Computers and …, 2018
22018
Novel materials for the design of cantilever transducers
N Nelson-Fitzpatrick
22011
Nanocomposite films
D Mitlin, C Ophus, S Evoy, V Radmilovic, R Mohammadi, K Westra, ...
The Governors of the University of Alberta (Edmonton, Alberta, CA); The …, 2010
22010
Fabrication and Characterization of Ultra Thin Resonant Nanocantilevers in Aluminium-Molybdenum Composites
N Nelson-Fitzpatrick, LM Fischer, S Evoy, C Ophus, Y Wang, D Mitlin, ...
The nanotechnology conference and trade show, University of Alberta, CA, Boston, 2006
12006
Fabrication of CMOS-compatible nanopillars for smart bio-mimetic CMOS image sensors
F Saffih, AM Elshurafa, MA Mohammad, N Nelson-Fitzpatrick, S Evoy
10th IEEE International NEWCAS Conference, 333-336, 2012
2012
Experimental study of sensitivity enhancement in SPR biosensors by use of zinc oxide intermediary layers
NF Chiu, A Singh, N Nelson-Fitzpatrick, S Dutt, S Evoy, CW Lin
Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and …, 2011
2011
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Articles 1–19