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Chih-Ming Lin, Ph.D.
Chih-Ming Lin, Ph.D.
Broadcom, Skyworks, SiLabs, UC Berkeley
Dirección de correo verificada de berkeley.edu - Página principal
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Temperature-compensated aluminum nitride Lamb wave resonators
CM Lin, TT Yen, YJ Lai, VV Felmetsger, MA Hopcroft, JH Kuypers, ...
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on 57 …, 2010
1962010
AlN/3C–SiC composite plate enabling high‐frequency and high‐Q micromechanical resonators
CM Lin, YY Chen, VV Felmetsger, DG Senesky, AP Pisano
Advanced Materials 24 (20), 2722-2727, 2012
1782012
Micromachined one-port aluminum nitride Lamb wave resonators utilizing the lowest-order symmetric mode
CM Lin, V Yantchev, J Zou, YY Chen, AP Pisano
Microelectromechanical Systems, Journal of 23 (1), 78-91, 2014
1422014
Lamb wave loop circuit for acoustic wave filter
CM Lin, J Zou, T Jibu, CS Lam, JJ Caron
US Patent App. 16/287,802, 2019
1372019
Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
CM Lin, TT Yen, VV Felmetsger, MA Hopcroft, JH Kuypers, AP Pisano
Applied Physics Letters 97 (8), 083501, 2010
1362010
Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references
JH Kuypers, CM Lin, G Vigevani, AP Pisano
Frequency Control Symposium (FCS), 2008 IEEE International, 240-249, 2008
1162008
Temperature sensor based on 4H-silicon carbide pn diode operational from 20 °C to 600 °C
N Zhang, CM Lin, DG Senesky, AP Pisano
Applied Physics Letters 104 (7), 073504, 2014
1152014
High-Q aluminum nitride Lamb wave resonators with biconvex edges
CM Lin, YJ Lai, JC Hsu, YY Chen, DG Senesky, AP Pisano
Applied Physics Letters 99 (14), 143501, 2011
1032011
AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices
CM Lin, WC Lien, VV Felmetsger, MA Hopcroft, DG Senesky, AP Pisano
Applied Physics Letters 97 (14), 141907, 2010
952010
Transducer design for AlN Lamb wave resonators
J Zou, CM Lin, CS Lam, AP Pisano
Journal of Applied Physics 121 (15), 2017
842017
Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures
CM Lin, YY Chen, VV Felmetsger, WC Lien, T Riekkinen, DG Senesky, ...
Journal of Micromechanics and Microengineering 23 (2), 025019, 2013
832013
The multi-mode resonance in AlN Lamb wave resonators
J Zou, CM Lin, A Gao, AP Pisano
Journal of Microelectromechanical Systems 27 (6), 973-984, 2018
702018
Anchor loss reduction in AlN Lamb wave resonators using phononic crystal strip tethers
CM Lin, JC Hsu, DG Senesky, AP Pisano
Frequency Control Symposium (FCS), 2014 IEEE International, 371-375, 2014
692014
High-Q Butterfly-Shaped AlN Lamb Wave Resonators
J Zou, CM Lin, G Tang, AP Pisano
IEEE Electron Device Letters 38 (12), 1739-1742, 2017
612017
Theoretical investigation of Lamb wave characteristics in AlN/3C–SiC composite membranes
CM Lin, YY Chen, AP Pisano
Applied Physics Letters 97 (19), 193506, 2010
512010
Theoretical study of thermally stable SiO2/AlN/SiO2 Lamb wave resonators at high temperatures
J Zou, CM Lin, YY Chen, AP Pisano
Journal of Applied Physics 115 (9), 2014
502014
Quality factor enhancement in Lamb wave resonators utilizing butterfly-shaped AlN plates
J Zou, CM Lin, AP Pisano
2014 IEEE International Ultrasonics Symposium, 81-84, 2014
382014
Characteristics of AlN Lamb wave resonators with various bottom electrode configurations
CM Lin, V Yantchev, YY Chen, VV Felmetsger, AP Pisano
IEEE International Frequency Control Symposium and European Frequency and …, 2011
322011
Characterization of aluminum nitride Lamb wave resonators operating at 600°C for harsh environment RF applications
TT Yen, CM Lin, X Zhao, VV Felmetsger, DG Senesky, MA Hopcroft, ...
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International …, 2010
302010
Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes
CM Lin, YY Chen, VV Felmetsge, DG Senesky, AP Pisano
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013
282013
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