An atomic force microscopy-based method for line edge roughness measurement M Fouchier, E Pargon, B Bardet Journal of applied physics 113 (10), 2013 | 56 | 2013 |
Porosity and thickness characterization of porous Si and oxidized porous Si layers–An ultraviolet–visible–mid infrared ellipsometry study B Fodor, E Agocs, B Bardet, T Defforge, F Cayrel, D Alquier, M Fried, ... microporous and mesoporous materials 227, 112-120, 2016 | 25 | 2016 |
Porous silicon in microelectronics: From academic studies to industry G Gautier, T Defforge, S Desplobain, J Billoué, M Capelle, P Povéda, ... ECS Transactions 69 (2), 123, 2015 | 16 | 2015 |
In situ investigation of mesoporous silicon oxidation kinetics using infrared emittance spectroscopy B Bardet, DDS Meneses, T Defforge, J Billoué, G Gautier Physical Chemistry Chemical Physics 18 (27), 18201-18208, 2016 | 10 | 2016 |
Impregnation of high-magnetization FeCo nanoparticles in mesoporous silicon: an experimental approach M Lepesant, B Bardet, LM Lacroix, P Fau, C Garnero, B Chaudret, ... Frontiers in chemistry 6, 609, 2018 | 7 | 2018 |
Integration of low-loss inductors on thin porous silicon membranes B Bardet, S Desplobain, J Billoue, L Ventura, G Gautier Microelectronic Engineering 194, 96-99, 2018 | 7 | 2018 |
Shape-controlled electrochemical synthesis of mesoporous Si/Fe nanocomposites with tailored ferromagnetic properties B Bardet, T Defforge, B Negulescu, D Valente, J Billoue, P Poveda, ... Materials Chemistry Frontiers 1 (1), 190-196, 2017 | 6 | 2017 |
A new method based on AFM for the study of photoresist sidewall smoothening and LER transfer during gate patterning M Fouchier, E Pargon, B Bardet Advanced Etch Technology for Nanopatterning II 8685, 53-62, 2013 | 4 | 2013 |
A Silicon-Embedded Inductor Surrounded by Porous Silicon for Improved Quality Factor R Wu, N Liao, JKO Sin, B Bardet, J Billoue, G Gautier ECS Journal of Solid State Science and Technology 7 (6), Q112, 2018 | 1 | 2018 |
Recent Advances in Porous Silicon Based Microelectronic Devices G Gautier, J Billoué, T Defforge, B Lu, B Bardet, J Lascaud, S Menard ECS Transactions 86 (1), 47, 2018 | | 2018 |
This journal is© the Owner Societies 2016 MK Pandey, H Kato, Y Ishii, Y Nishiyama | | |