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Benjamin BARDET
Benjamin BARDET
GREMAN, Université de Tours, STMicroelectronics
Dirección de correo verificada de st.com
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Citado por
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Año
An atomic force microscopy-based method for line edge roughness measurement
M Fouchier, E Pargon, B Bardet
Journal of applied physics 113 (10), 2013
562013
Porosity and thickness characterization of porous Si and oxidized porous Si layers–An ultraviolet–visible–mid infrared ellipsometry study
B Fodor, E Agocs, B Bardet, T Defforge, F Cayrel, D Alquier, M Fried, ...
microporous and mesoporous materials 227, 112-120, 2016
252016
Porous silicon in microelectronics: From academic studies to industry
G Gautier, T Defforge, S Desplobain, J Billoué, M Capelle, P Povéda, ...
ECS Transactions 69 (2), 123, 2015
162015
In situ investigation of mesoporous silicon oxidation kinetics using infrared emittance spectroscopy
B Bardet, DDS Meneses, T Defforge, J Billoué, G Gautier
Physical Chemistry Chemical Physics 18 (27), 18201-18208, 2016
102016
Impregnation of high-magnetization FeCo nanoparticles in mesoporous silicon: an experimental approach
M Lepesant, B Bardet, LM Lacroix, P Fau, C Garnero, B Chaudret, ...
Frontiers in chemistry 6, 609, 2018
72018
Integration of low-loss inductors on thin porous silicon membranes
B Bardet, S Desplobain, J Billoue, L Ventura, G Gautier
Microelectronic Engineering 194, 96-99, 2018
72018
Shape-controlled electrochemical synthesis of mesoporous Si/Fe nanocomposites with tailored ferromagnetic properties
B Bardet, T Defforge, B Negulescu, D Valente, J Billoue, P Poveda, ...
Materials Chemistry Frontiers 1 (1), 190-196, 2017
62017
A new method based on AFM for the study of photoresist sidewall smoothening and LER transfer during gate patterning
M Fouchier, E Pargon, B Bardet
Advanced Etch Technology for Nanopatterning II 8685, 53-62, 2013
42013
A Silicon-Embedded Inductor Surrounded by Porous Silicon for Improved Quality Factor
R Wu, N Liao, JKO Sin, B Bardet, J Billoue, G Gautier
ECS Journal of Solid State Science and Technology 7 (6), Q112, 2018
12018
Recent Advances in Porous Silicon Based Microelectronic Devices
G Gautier, J Billoué, T Defforge, B Lu, B Bardet, J Lascaud, S Menard
ECS Transactions 86 (1), 47, 2018
2018
This journal is© the Owner Societies 2016
MK Pandey, H Kato, Y Ishii, Y Nishiyama
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