| Fully differential single resonator FM gyroscope using CW/CCW mode separator T Tsukamoto, S Tanaka Journal of Microelectromechanical Systems 27 (6), 985-994, 2018 | 53 | 2018 |
| Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator T Tsukamoto, S Tanaka 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 36 | 2017 |
| Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure C Liu, J Froemel, J Chen, T Tsukamoto, S Tanaka Microsystem Technologies 25, 487-497, 2019 | 24 | 2019 |
| Virtually rotated MEMS whole angle gyroscope using independently controlled CW/CCW oscillations T Tsukamoto, S Tanaka 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2018 | 23 | 2018 |
| FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator T Tsukamoto, S Tanaka 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017 | 23 | 2017 |
| Rate integrating gyroscope using independently controlled CW and CCW modes on single resonator T Tsukamoto, S Tanaka Journal of Microelectromechanical Systems 30 (1), 15-23, 2020 | 20 | 2020 |
| Magnetocaloric cooling of a thermally-isolated microstructure T Tsukamoto, M Esashi, S Tanaka Journal of Micromechanics and Microengineering 22 (9), 094008, 2012 | 19 | 2012 |
| Quad mass gyroscope with 16 ppm frequency mismatch trimmed by focus ion beam J Chen, T Tsukamoto, S Tanaka 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2019 | 16 | 2019 |
| Quad mass resonator with frequency mismatch of 3 ppm trimmed by focused ion beam J Chen, T Tsukamoto, S Tanaka Journal of Microelectromechanical Systems 30 (3), 392-400, 2021 | 14 | 2021 |
| Micro thermal diode with glass thermal insulation structure embedded in vapor chamber T Hirayanagi, T Tsukamoto, M Esashi, S Tanaka Journal of Physics: Conference Series 476 (1), 012019, 2013 | 14 | 2013 |
| High spatial, temporal and temperature resolution thermal imaging method using Eu (TTA) 3 temperature sensitive paint T Tsukamoto, M Esashi, S Tanaka Journal of Micromechanics and Microengineering 23 (11), 114015, 2013 | 14 | 2013 |
| Micro thermal diode with glass thermal insulation structure embedded in a vapor chamber T Tsukamoto, T Hirayanagi, S Tanaka Journal of Micromechanics and Microengineering 27 (4), 045001, 2017 | 12 | 2017 |
| Infrared thermal detector array using Eu (TTA) 3-based temperature sensitive paint for optical readable thermal imaging device M Wang, T Tsukamoto, S Tanaka Journal of Micromechanics and Microengineering 25 (3), 035012, 2015 | 12 | 2015 |
| A micro thermal switch with a stiffness-enhanced thermal isolation structure T Tsukamoto, M Esashi, S Tanaka Journal of Micromechanics and Microengineering 21 (10), 104008, 2011 | 12 | 2011 |
| Feedback control of thin film PZT MEMS actuator with integrated buried piezoresistors A Vergara, T Tsukamoto, W Fang, S Tanaka Sensors and Actuators A: Physical 332, 113131, 2021 | 11 | 2021 |
| Hybrid MEMS-SMA structure for intraocular lenses TDO Moura, T Tsukamoto, DW de Lima Monteiro, S Tanaka Sensors and Actuators A: Physical 243, 15-24, 2016 | 11 | 2016 |
| Quality factor trimming method using thermoelastic dissipation for multi-ring resonator H Abdelli, T Tsukamoto, S Tanaka Sensors and Actuators A: Physical 332, 113044, 2021 | 10 | 2021 |
| A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames P Baranov, T Nesterenko, E Barbin, A Koleda, S Tanaka, T Tsukamoto, ... Sensor Review 39 (5), 670-681, 2019 | 10 | 2019 |
| Automated frequency and quality factor mismatch compensation method for MEMS rate integrating gyroscope T Tsukamoto, S Tanaka 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 10 | 2019 |
| MEMS rate integrating gyroscope with temperature corrected virtual rotation T Tsukamoto, S Tanaka 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2019 | 10 | 2019 |
Shuji TanakaTohoku UniversityVerified email at mems.mech.tohoku.ac.jp
